采用绝缘体上的半导体技术制备集成的多模干涉型光耦合器和光开关
收稿日期: 2001-09-19
修回日期: 2002-05-18
网络出版日期: 2003-01-18
Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology
Received date: 2001-09-19
Revised date: 2002-05-18
Online published: 2003-01-18
Supported by
supported by National Ministry of Science and Technology(G200003666)and the National Seience Found at ionof China(69896260 and 69990540)
余金中 , 魏红振 , 严清峰 , 夏金松 , 张小峰 . 采用绝缘体上的半导体技术制备集成的多模干涉型光耦合器和光开关[J]. 中国科学院大学学报, 2003 , 20(1) : 1 -6 . DOI: 10.7523/j.issn.2095-6134.2003.1.001
Integrated multimode interference (MMI) coupler based on silicon-on-insulator(SOI) has been becoming a kind of more and more attractive device in optical systems. SiO2 thin cladding layers (＜1.0 μm) can be usedin SOI waveguide due to the large index step be-tween Si and SiO2, making them compatible with VLSI technology. The design and fabrica-tion of MMI optical couplers and optical switches in SOI technology are presented in thepa-per. We demonstrated the switching time of 2 × 2 MMI-MZI thermo-optical switch is less than 20 μs.
Key words： SOI; MMI; optical coupler; optical switch; integrated optics
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