收稿日期: 2016-03-16
修回日期: 2016-04-18
网络出版日期: 2017-01-15
基金资助
国家自然科学基金（61308062）资助
Phase distribution measurement of liquid crystal optical phased array based on orthogonal phase shift interferometry
Received date: 2016-03-16
Revised date: 2016-04-18
Online published: 2017-01-15
液晶衍射光栅在电控下能够实现光束控制和偏转，与传统的光束控制器件相比具有稳定性强、速度快、体积和质量小等优点。对液晶衍射光栅的光波调制相位分布进行精密测量是该器件研制过程的重要环节和评价其性能的关键手段。提出正交移相干涉测量液晶衍射光栅调制相位分布的方法。通过透射式相位板的对比实验对测量方法的可行性和准确性进行验证，分析测量精度和误差。使用该方法实现对液晶光栅相位分布的测量。实验表明，此方法简单、快速、可靠，能够准确测量出液晶衍射光栅±2级的波前调制相位信息。
关键词： 液晶衍射光栅; 波前相位检测; 琼斯矩阵; PZT相移; Zernike多项式
赵英明 , 杨若夫 , 杨春平 . 正交移相干涉法测量液晶衍射光栅调制相位[J]. 中国科学院大学学报, 2017 , 34(1) : 32 -37 . DOI: 10.7523/j.issn.2095-6134.2017.01.005
Liquid crystal optical phased array (LCOPA) can be easily used for beam controlling and has a lot of advantages such as long-term stability, high speed, small size and weight compared with traditional devices. The phase distribution measurement of LCOPA is an important part of the LCOPA development process and a method for evaluating performance of the device. An orthogonal phase shift interferometry(OPSI) was used to measure the phase distribution of LCOPA. The feasibility and accuracy of the method was certificated by optical phase board experiments, and the phase distribution of LCOPA was measured by the proposed method. The experiment showed the briefness and accuracy of the proposed method. The phase information at ±2 grades of LCOPA was obtained.
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