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中国科学院大学学报 ›› 2003, Vol. 20 ›› Issue (1): 69-72.DOI: 10.7523/j.issn.2095-6134.2003.1.011

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金属氧化物纳米点薄膜的模板法合成

郜涛, 孟国文, 张立德   

  1. 中国科学院固体物理研究所, 合肥 230031
  • 收稿日期:2002-06-27 修回日期:2002-08-26 发布日期:2003-01-18
  • 基金资助:

    国家自然科学基金(19974055);973(19994506)资助项目

Template Synthesis of Metal Oxide Nanodot Films

Gao Tao, Meng Guowen, Zhang Lide   

  1. Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China
  • Received:2002-06-27 Revised:2002-08-26 Published:2003-01-18

摘要:

报道了一种简便的金属氧化物纳米点薄膜的合成方法.首先制备了具有有序纳米凹坑阵列的多孔阳极氧化铝模板,然后在模板表面真空蒸镀金属薄膜,对所制备的金属薄膜进行氧化处理,得到了具有有序纳米点阵列的金属氧化物纳米点薄膜.纳米点的直径约为100 nm,高度约为45 nm,以六边形有序排列,密度约为2×1013个/m2.

关键词: 纳米点薄膜, 模板法合成, 金属氧化物

Abstract:

A simple and convenient synthesis approach for metal oxide nanodot films has been reported. Porous anodic alumina (PAA) films with ordered nanocave arrays were fabricated firstly and used as template materials. Then the metals were evaporated on the surface of the PAA template following with oxidization in air. The prepared metal oxide thin films have highly ordered hemispherical nanodot arrays arranged in a hexagonal pattern. The density of the nanodots in the array is about 2×1013 /m2 with dot diameters and heights about 100 nm and 45 nm, respectively.

Key words: nanodot films, template synthesis, metal oxide

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