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SiGe材料系自组织Ge量子点研究(英文)

  • 黄昌俊 ,
  • 王启明
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  • 中国科学院半导体研究所集成光电国家重点实验室 北京100083
黄昌俊:在博士研究生期间,在国际知名刊物(如APL,JAP等)上发表多篇论文.荣获2002年度中国科学院院长奖特别奖导师王启明:研究员,从事半导体与光电子学研究.

收稿日期: 2003-01-06

  网络出版日期: 2003-07-10

基金资助

supportedbythemajorstatebasicresearchprogram(973)(G2000036603),"863 "ResearchPlan; andNationalNaturalScienceFoundationofChina(69876260)

Self-Assembled Germanium Quantum Dots in Silicon Germanium Material System

  • Huang Changjun ,
  • Wang Qiming
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  • Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Received date: 2003-01-06

  Online published: 2003-07-10

摘要

在当今Si基光电子研究中,SiGe材料系自组织Ge量子点是最有希望对Si材料运用能带工程实现人工改性的途径之一。Ge在Si上 4.2 %的晶格失配可以制造大小尺寸不同的纳米结构,还可适应其他多种器件需要。对自组织Ge量子点的形成过程、形貌演化、光学和电学性质,以及提高量子点平面排布有序性的方法进行了系统的分析和研究,并着重介绍了实验中发现的新现象、新模型和新方法,其中包括量子点的反常形状跃迁、自覆盖效应、Ge/Si量子点的II型能带结构、Ge/Si量子点的载流子热弛豫模型和纳米尺寸的周期性图形衬底的全息制备方法.

本文引用格式

黄昌俊 , 王启明 . SiGe材料系自组织Ge量子点研究(英文)[J]. 中国科学院大学学报, 2003 , 20(4) : 510 -516 . DOI: 10.7523/j.issn.2095-6134.2003.4.019

Abstract

In Silicon-based optoelectronics research, the self-assembled Ge quantum dots are one of the most promising potential means to explore the novel properties of Si by applying the bandgap engineering. The lattice mismatch of 4.2% between the Ge and Si can provide us various nanostructures in a wide range of size, which can be utilized to realize the future electrical and optical devices. By introducing the growth techniques and device application perspectives of self-assembled Ge quantum dots, describing the morphological evolution of the Ge grown on Si (001) substrate and the optical and electronic properties of these nanostructure,the authors reveal the approaches to fabricate the ordered Ge quantum dots. Some novel findings in our work will be included, such as the reverse shape transition of the quantum dots,the self-embedding effect, the verification of band alignment of Ge quantum dots, the thermal relaxation model of the carriers in Ge/Si multilayer structure, and a new approach to fabricate the patterned substrate for ordered Ge quantum dots.

参考文献

[1]C J Huang, X P Zhu, et al. Nanofabrication of grid-patterned substrate by holographic lithography. J Cryst Growth, 2002, 236:141~144

[2]C J Huang, Y Tang, et al. X-ray evidence for Ge/Si (001) island columns in multilayer structure. J Cryst Growth, 2001, 223: 99~103

[3]C J Huang, Y H Zuo, et al. Optical characterization of the Ge/Si (001) islands in multilayer structure. Proc SPIE, 2001, 4580:202~208

[4]C J -Huang, Y H Zuo, et al. Shape evolution of Ge/Si (001) islands induced by strain-driven alloying. Appl Phys Lett, 2001, 78(24): 3881~3883

[5]C J Huang, Y Tang, et al. Different transfer paths for thermally activated electrons and holes in self-organized Ge/Si (001) islands in a multilayer structure. Appl Phys Lett, 2001, 78(14): 2006~2008

[6]C J Huang, D Z Li, et al. Atomic-force-microscopy investigation of the formation and evolution of Ge islands on GexSi1-x strained layers. Appl Phys Lett, 2000, 77(3): 391~393

[7]C J Huang, D Z Li, et al. Oblique alignment of columns of self-organized Ge/Si (001) islands in multilayer structure. Appl Phys Lett, 2000, 77(18): 2852~2854

[8]Y C Zhang, C J Huang, et al. Structure and photoluminescence study of InGaAs quantum dots on InAlAs wetting layer. Chin Phys Lett, 2001, 18:1411~1414

[9]Y C Zhang, C J Huang, et al. Thermal redistribution of photocarriers between bimodal quantum dots. J Appl Phys, 2001, 90:1973~1976

[10]Y C Zhang, C J Huang, et al. Optical properties of InGaAs quantum dots formed on InAlAs wetting layer. J Cryst Growth, 2001,224: 41~46

[11]F Gao, C J Huang, et al. Changing the size and shape of Ge island by chemical etching. J Cryst Growth, 2001, 231: 17~21

[12]Y C Zhang, C J Huang, et al. Temperature dependence of electron redistribution in modulation-doped InAs/GaAs quantum dots. J Cryst Growth, 2000, 219:199~204

[13]D Li, C Huang, et al. Effect of low-temperature SiGe interlayer on the growth of relaxed SiGe. J Cryst Growth, 2000, 213: 308~311

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