Journal of University of Chinese Academy of Sciences >
Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology
Received date: 2001-09-19
Revised date: 2002-05-18
Online published: 2003-01-18
Supported by
supported by National Ministry of Science and Technology(G200003666)and the National Seience Found at ionof China(69896260 and 69990540)
Integrated multimode interference (MMI) coupler based on silicon-on-insulator(SOI) has been becoming a kind of more and more attractive device in optical systems. SiO2 thin cladding layers (＜1.0 μm) can be usedin SOI waveguide due to the large index step be-tween Si and SiO2, making them compatible with VLSI technology. The design and fabrica-tion of MMI optical couplers and optical switches in SOI technology are presented in thepa-per. We demonstrated the switching time of 2 × 2 MMI-MZI thermo-optical switch is less than 20 μs.
Key words： SOI; MMI; optical coupler; optical switch; integrated optics
Yu Jinzhong , Wei Hongzhen , Yan Qinfeng , Xia Jinsong , Zhang Xiaofeng . Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology[J]. Journal of University of Chinese Academy of Sciences, 2003 , 20(1) : 1 -6 . DOI: 10.7523/j.issn.2095-6134.2003.1.001
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