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›› 2014, Vol. 31 ›› Issue (1): 32-37.DOI: 10.7523/j.issn.2095-6134.2014.01.006

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Comparative study on sensitivities of frequency-domain thermoreflectance methods during the thin-film material thermophysical property measurement

XU Xianfeng1,2, TANG Dawei1   

  1. 1 Institute of Engineering Thermophysics, Chinese Academy of Sciences, Beijing 100190, China;
    2 University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2013-03-04 Revised:2013-04-19 Online:2014-01-15

Abstract:

Based on Fourier's thermal conduction law, we deduced theoretical phase expressions with respect to frequency in continuous-wave and pulsed frequency-domain thermoreflectance(FDTR) methods by a transfer matrix thermal analysis way. Comparisons of sensitivities between the two methods in two common types of systems are made, and the results lead to theoretical basis for selection of FDTR methods in experimental measurements. The results show that high accuracies of film material thermal properties in experimental test are available with an appropriate FDTR method as well as the best frequency range for fitting.

Key words: continuous-wave and pulsed FDTR, layered structure, thermal conductivity, interfacial thermal conductance, sensitivity analysis

CLC Number: