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›› 2003, Vol. 20 ›› Issue (1): 1-6.DOI: 10.7523/j.issn.2095-6134.2003.1.001

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Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology

Yu Jinzhong, Wei Hongzhen, Yan Qinfeng, Xia Jinsong, Zhang Xiaofeng   

  1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • Received:2001-09-19 Revised:2002-05-18 Online:2003-01-18
  • Supported by:

    supported by National Ministry of Science and Technology(G200003666)and the National Seience Found at ionof China(69896260 and 69990540)

Abstract:

Integrated multimode interference (MMI) coupler based on silicon-on-insulator(SOI) has been becoming a kind of more and more attractive device in optical systems. SiO2 thin cladding layers (<1.0 μm) can be usedin SOI waveguide due to the large index step be-tween Si and SiO2, making them compatible with VLSI technology. The design and fabrica-tion of MMI optical couplers and optical switches in SOI technology are presented in thepa-per. We demonstrated the switching time of 2 × 2 MMI-MZI thermo-optical switch is less than 20 μs.

Key words: SOI, MMI, optical coupler, optical switch, integrated optics

CLC Number: